Fano filter modal analysis based on transferred silicon nanomembranes on flexible substrates

Transfer of micro and nano-photonic silicon nanomembrane waveguide devices on flexible substrates.

This paper demonstrates transfer of optical devices without extra un-patterned silicon onto low-cost, flexible plastic substrates using single-crystal silicon nanomembranes. Employing this transfer technique, stacking two layers of silicon nanomembranes with photonic crystal waveguide in the first layer and multi mode interference couplers in the second layer is shown, respectively. This techni...

Silicon nanomembranes as a means to evaluate stress evolution in deposited thin films

Thin-film deposition on ultra-thin substrates poses unique challenges because of the potential for a dynamic response to the film stress during deposition. While theoretical studies have investigated film stress related changes in bulk substrates, little has been done to learn how stress might evolve in a film growing on a compliant substrate. We use silicon nanomembranes (SiNMs), extremely thi...

Self-assembled nanodielectrics and silicon nanomembranes for low voltage, flexible transistors, and logic gates on plastic substrates

Flexible integrated photonics: where materials, mechanics and optics meet [Invited]

While the vast majority of integrated photonic devices are traditionally fabricated on rigid substrates, photonic integration of both passive and active photonic devices on flexible polymer substrates has been demonstrated in recent years, and its applications in imaging, sensing and optical interconnects are being actively pursued. This paper presents an overview of the emerging field of mecha...

Nanomembrane-based materials for Group IV semiconductor quantum electronics

Strained-silicon/relaxed-silicon-germanium alloy (strained-Si/SiGe) heterostructures are the foundation of Group IV-element quantum electronics and quantum computation, but current materials quality limits the reliability and thus the achievable performance of devices. In comparison to conventional approaches, single-crystal SiGe nanomembranes are a promising alternative as substrates for the e...